DocumentCode
329251
Title
High Resolution Shadow Mask Patterning In Deep Holes And Its Application To An Electrical Wafer Feed-through
Author
Burger, G.J. ; Smulders, E.J.T. ; Berenschot, J.W. ; Lammerink, T.S.J. ; Fluitman, J.H.J. ; Imai, S.
Author_Institution
University of Twente
Volume
1
fYear
1995
fDate
25-29 Jun 1995
Firstpage
573
Lastpage
576
Keywords
Atomic layer deposition; Atomic measurements; Feeds; Laboratories; Mechanical engineering; Micromachining; Parasitic capacitance; Resists; Scattering; Substrates;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.717289
Filename
717289
Link To Document