DocumentCode

329252

Title

The Formation Of Electroplating Molds By Reactive Ion Etching

Author

Chang, Shih-Chia ; Putty, Michael W. ; Hicks, David B.

Author_Institution

General Motors Research and Development Center

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

577

Lastpage

580

Keywords

Aluminum; Chromium; Etching; Gold; Heat treatment; Micromotors; Microsensors; Nickel; Polymers; Resists;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717290

Filename

717290