Title :
A High-performance, Low Cost Capacitive Accelerometer Trimmed Using Nonvolatile Potentiometers (EEPOT´s)
Author :
Tschan, Thomas ; Urbanek, Wolfram ; Lim, Mel ; Allen, Henry ; Knutti, James
Author_Institution :
Silicon Microstructures Inc.
Keywords :
Accelerometers; Application specific integrated circuits; Costs; Etching; Manufacturing processes; Piezoresistance; Potentiometers; Silicon; Temperature dependence; Temperature sensors;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717296
