DocumentCode
329257
Title
A High-accuracy Multi-element Silicon Barometric Pressure Sensor
Author
Zhang, Yafan ; Wise, Kensall D.
Author_Institution
The University of Michigan
Volume
1
fYear
1995
fDate
25-29 Jun 1995
Firstpage
608
Lastpage
611
Keywords
Biomedical measurements; Biosensors; Dynamic range; Electrodes; Microcontrollers; Process control; Silicon; Solid state circuits; Temperature sensors; Transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.717298
Filename
717298
Link To Document