Title :
A High-accuracy Multi-element Silicon Barometric Pressure Sensor
Author :
Zhang, Yafan ; Wise, Kensall D.
Author_Institution :
The University of Michigan
Keywords :
Biomedical measurements; Biosensors; Dynamic range; Electrodes; Microcontrollers; Process control; Silicon; Solid state circuits; Temperature sensors; Transducers;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717298
