DocumentCode
329258
Title
Surface Micromachined Capacitive Differential Pressure Sensor With Lithographically-defined Silicon Diaphragm
Author
Mastrangelo, C.H. ; Zhang, X. ; Tang, W.C.
Author_Institution
University of Michigan
Volume
1
fYear
1995
fDate
25-29 Jun 1995
Firstpage
612
Lastpage
615
Keywords
Capacitive sensors; Capacitors; Electrodes; Error correction; Etching; Gas detectors; Sensor phenomena and characterization; Silicon; Temperature sensors; Transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.717299
Filename
717299
Link To Document