Title :
A Fully Integrated Surface Micromachined Pressure Sensor With Low Temperature Dependence
Author :
Dudaicevs, H. ; Manoli, Y. ; Mokwa, W. ; Schmidt, M. ; Spiegel, E.
Author_Institution :
Fraunhofer Institute of Microelectronic Circuits and Systems
Keywords :
Biomembranes; CMOS process; Capacitive sensors; Etching; Mechanical sensors; Micromachining; Sensor arrays; Silicon; Temperature dependence; Temperature sensors;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717300
