DocumentCode

329259

Title

A Fully Integrated Surface Micromachined Pressure Sensor With Low Temperature Dependence

Author

Dudaicevs, H. ; Manoli, Y. ; Mokwa, W. ; Schmidt, M. ; Spiegel, E.

Author_Institution

Fraunhofer Institute of Microelectronic Circuits and Systems

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

616

Lastpage

619

Keywords

Biomembranes; CMOS process; Capacitive sensors; Etching; Mechanical sensors; Micromachining; Sensor arrays; Silicon; Temperature dependence; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717300

Filename

717300