Title :
Self-excited Force Sensing Microcantilevers With Piezoelectric Thin Films For Dynamic Scanning Force Microscopy
Author :
Itoh, Toshihiro ; Suga, Tadatoino
Author_Institution :
The University of Tokyo
Keywords :
Chromium; Fabrication; Force sensors; Gold; Microscopy; Oscillators; Piezoelectric films; Plasma temperature; Voltage; Zinc oxide;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717309
