DocumentCode

329264

Title

Lateral Force Measurements In A Scanning Force Microscope With Piezoresistive Sensors

Author

Brugger, J. ; Burger, J. ; Binggeli, M. ; Imura, R. ; de Rooij, N.F.

Author_Institution

University of Neuchatel

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

636

Lastpage

639

Keywords

Force measurement; Force sensors; Microscopy; Piezoresistance; Piezoresistive devices; Silicon; Solid state circuits; Springs; Stress; Transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717310

Filename

717310