Title :
Microelectromechanical Scanning Tunneling Microscope
Author :
Xu, Yang ; Miller, Scott A. ; MacDonald, Noel C.
Author_Institution :
Cornell University
Keywords :
Actuators; Atomic force microscopy; Atomic measurements; Conductors; Fabrication; Instruments; Probes; Semiconductor device measurement; Silicon; Tunneling;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717311
