Title :
A Miniaturised Fabry Perot AFM Sensor
Author :
Ruf, A. ; Abraham, M. ; Lacher, M. ; Mayr, K. ; Zetterer, Th
Author_Institution :
IMM Institute of Microtechnology GmbH
Keywords :
Atomic force microscopy; Etching; Interference; Mirrors; Nickel; Optical films; Optical interferometry; Optical sensors; Sensor arrays; Transistors;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717316
