Title :
A Non-contact Inductive Position Sensor For Use In Micro Machines
Author :
Zmood, R.B. ; Zhang, Y.C. ; Yu, P.L.
Author_Institution :
Royal Melbourne Institute of Technology
Keywords :
Capacitive sensors; Circuits; Coils; Demodulation; Frequency conversion; Impedance; Magnetic levitation; Magnetic sensors; Parasitic capacitance; Transducers;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717317
