DocumentCode

329268

Title

A Non-contact Inductive Position Sensor For Use In Micro Machines

Author

Zmood, R.B. ; Zhang, Y.C. ; Yu, P.L.

Author_Institution

Royal Melbourne Institute of Technology

Volume

1

fYear

1995

fDate

25-29 Jun 1995

Firstpage

664

Lastpage

666

Keywords

Capacitive sensors; Circuits; Coils; Demodulation; Frequency conversion; Impedance; Magnetic levitation; Magnetic sensors; Parasitic capacitance; Transducers;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

conf

DOI

10.1109/SENSOR.1995.717317

Filename

717317