• DocumentCode
    329269
  • Title

    A Micromachined Sub-micrometer Photodiode For Scanning Probe Microscopy

  • Author

    Davis, R.C. ; Williams, C.C. ; Neuzil, P.

  • Author_Institution
    University of Utah
  • Volume
    1
  • fYear
    1995
  • fDate
    25-29 Jun 1995
  • Firstpage
    667
  • Lastpage
    670
  • Keywords
    Etching; Optical microscopy; Optical recording; Optical sensors; Optical surface waves; Photodiodes; Resists; Scanning probe microscopy; Silicon; Spatial resolution;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
  • Print_ISBN
    91-630-3473-5
  • Type

    conf

  • DOI
    10.1109/SENSOR.1995.717318
  • Filename
    717318
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=329269