Title :
Design equations for the on-state capacitance of the RF MEMS shunt switch
Author :
El-Din, Muhammad A Salah ; Safwat, Amr M E ; Ragaie, Hani F. ; Haddara, Hisham
Author_Institution :
Dept. of Electron. & Commun. Eng., Ain Shams Univ., Cairo, Egypt
Abstract :
A simple methodology is developed to determine the value of MEMS shunt switch on-state capacitance using established design equations for planar transmission lines. Results agreed with the on-state values provided by 3D electrostatic simulator with an error of less than 4%.
Keywords :
capacitor switching; microswitches; transmission lines; 3D electrostatic simulator; RF MEMS shunt switch on-state capacitance; planar transmission line; radiofrequency microelectromechanical systems; Capacitance; Circuit simulation; Communication switching; Equations; Micromechanical devices; Microstrip; Radio frequency; Radiofrequency microelectromechanical systems; Shunt (electrical); Switches;
Conference_Titel :
Radio Science Conference, 2004. NRSC 2004. Proceedings of the Twenty-First National
Print_ISBN :
977-5031-77-X
DOI :
10.1109/NRSC.2004.1321862
