Title :
Emission stability of DLC coated metal-tips FEA
Author :
Jung, Jae Hoon ; Ju, Byeong Kwon ; Lee, Yun Hi ; Park, Kyu Chang ; Jang, Jin ; Jung, Yu Ho ; Kim, Chul Ju ; Oh, Myung Hwan
Author_Institution :
Div. of Electron. & Inf. Technol., Korea Inst. of Sci. & Technol., Seoul, South Korea
Abstract :
We have improved an emission stability of Mo tips FEA (field emitter array). The effect of DLC (Diamond Like Carbon) films coated by layer-by-layer technique using PECVD on the electron emission characteristics of Mo tips FEA is examined. Turn-on voltage was lowered from 80 V for Mo tips to 65 V for DLC coated Mo tips FEA and maximum emission current was increased from 140 μA for Mo tips to 320 μA for DLC coated Mo tips FEA. An anode current for DLC coated Mo tips and Mo tips FEA of 0.1 μA per emitter are measured at the gate voltage of about 87 V and 107 V, respectively. Add the emission current of DLC coated Mo tips FEA was more stable than that of Mo tips FEA
Keywords :
carbon; electron field emission; molybdenum; plasma CVD coatings; vacuum microelectronics; 140 to 320 muA; 65 to 80 V; DLC coating; FEA; Mo-C; PECVD; diamond like carbon film; electron emission stability; field emitter array; layer-by-layer growth; metal tip; turn-on voltage; Anodes; Electron emission; Electron guns; Field emitter arrays; Plasma measurements; Plasma properties; Plasma temperature; Stability; Thermal conductivity; Voltage;
Conference_Titel :
Vacuum Microelectronics Conference, 1996. IVMC'96., 9th International
Conference_Location :
St. Petersburg
Print_ISBN :
0-7803-3594-5
DOI :
10.1109/IVMC.1996.601814
