Title :
Different Couplings Of Electrochemical Chip Sensors With Actuators In Microanalytical Fluidic Systems
Author :
Hintsche, R. ; Paeschke, M. ; Uhlig, A. ; Kruse, C. ; Dittrich, F. ; Pham, M.T. ; Howitz, S.
Author_Institution :
Fraunhofer-Institut fur Siliziumtechnologie
Keywords :
Actuators; Diodes; Electrodes; Etching; Fluidic microsystems; Microfluidics; Platinum; Semiconductor thin films; Sensor systems; Silicon;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717346
