Different Couplings Of Electrochemical Chip Sensors With Actuators In Microanalytical Fluidic Systems

Author

Hintsche, R. ; Paeschke, M. ; Uhlig, A. ; Kruse, C. ; Dittrich, F. ; Pham, M.T. ; Howitz, S.

Author_Institution

Fraunhofer-Institut fur Siliziumtechnologie

Volume

fYear

1995

fDate

25-29 Jun 1995

Firstpage

772

Lastpage

774

Keywords

Actuators; Diodes; Electrodes; Etching; Fluidic microsystems; Microfluidics; Platinum; Semiconductor thin films; Sensor systems; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on

Print_ISBN

91-630-3473-5

Type

DOI

10.1109/SENSOR.1995.717346

Filename

717346

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