Diamond cold cathodes for electron guns

Author

Givargizov, E.I. ; Zhirnov, V.V. ; Chubun, N.N. ; Voronin, A.B.

Author_Institution

Inst. of Crystallogr., Acad. of Sci., Moscow, Russia

fYear

1996

fDate

7-12 Jul 1996

Firstpage

308

Lastpage

312

Abstract

Cold cathodes based on single sharp silicon tip with diamond coating were tested for electron gun application. Emission stability, reproducibility of current-voltage characteristics as well as emission divergence were studied. No hysteresis or shift of the emission characteristics at long-time repeated measurements have been found. Low-frequency current fluctuations were less than 10%. The life test of a cathode have been performed during 120 hours. The current decrease was within 10% of the initial value at the end of the test. The angular divergence of the emission was within 3⁰

Keywords

CVD coatings; cathodes; current fluctuations; diamond; electron field emission; electron guns; life testing; silicon; stability; vacuum microelectronics; 120 hr; C-Si; Si tip; angular divergence; current-voltage characteristics; diamond coating; diamond cold cathodes; electron guns; emission divergence; emission stability; life test; low-frequency current fluctuations; Cathodes; Coatings; Current-voltage characteristics; Electron guns; Fluctuations; Hysteresis; Reproducibility of results; Silicon; Stability; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1996. IVMC'96., 9th International

Conference_Location

St. Petersburg

Print_ISBN

0-7803-3594-5

Type

conf

DOI

10.1109/IVMC.1996.601830

Filename

601830