Title :
Application Of Plasma Polymer Film Coated Sensors To Gas Identification Using Linear Filters
Author :
Nakamura, Masayuki ; Sugimoto, Iwao ; Kuwano, Hiroki
Author_Institution :
NTT Interdisciplinary Research Laboratories
Keywords :
Chemical sensors; Gas detectors; Gases; Nonlinear filters; Oscillators; Plasma applications; Plasma chemistry; Polymer films; Sensor arrays; Sensor systems;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717352
