DocumentCode
329309
Title
Selected-area Deposition Of Multiple Active Films For Conductometric Microsensor Arrays
Author
Semancik, S. ; Cavicchi, R.E. ; Kreider, K.G. ; Suehle, J.S. ; Chaparala, P.
Author_Institution
National Institute of Standards and Technology
Volume
1
fYear
1995
fDate
25-29 June 1995
Firstpage
831
Lastpage
834
Keywords
Chemical sensors; Chemical technology; Conductive films; Gas detectors; Laboratories; Microsensors; Semiconductivity; Semiconductor films; Sensor arrays; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location
Stockholm, Sweden
Print_ISBN
91-630-3473-5
Type
conf
DOI
10.1109/SENSOR.1995.717361
Filename
717361
Link To Document