Title :
Si-planar-pellistor: Designs For Temperature Modulated Operation
Author :
Aigner, Robert ; Dietl, Markus ; Katterloher, Rainer ; Klee, Veit
Author_Institution :
Technische Universitat Munchen
Keywords :
Chemical elements; Electric resistance; Energy consumption; Frequency; Gases; Mechanical sensors; Oxidation; Resistance heating; Temperature sensors; Thermal resistance;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Conference_Location :
Stockholm, Sweden
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717363
