Title :
Electrostatic voltage sensor and displacement sensor, using SAW directional coupler
Author :
Ishido, M. ; Ojima, K. ; Kikuta, N.
Author_Institution :
Fac. of Eng., Kobe Univ., Japan
Abstract :
It is shown experimentally that a surface acoustic wave (SAW) directional coupler can be used as an electrostatic voltage sensor and as a displacement sensor. The sensitivity of the electrostatic voltage sensor is 45 Hz mm/V in the case of a waveguide gap of 0.4 mm. It is possible to increase the sensitivity by making the pitch of the IDT smaller and increasing the oscillation frequency. The sensitivity of the displacement sensor has a high value of 3.3×104 Hz/mm, but the existence of the mode jumps has to be taken into account
Keywords :
directional couplers; surface acoustic wave devices; voltage measurement; SAW directional coupler; displacement sensor; electrostatic voltage sensor; sensitivity; waveguide gap; Directional couplers; Electrostatics; Frequency; Joining processes; Oscillators; Surface acoustic waves; Surface waves; Voltage; Waveguide discontinuities; Waveguide transitions;
Conference_Titel :
Ultrasonics Symposium, 1991. Proceedings., IEEE 1991
Conference_Location :
Orlando, FL
DOI :
10.1109/ULTSYM.1991.234182
