• DocumentCode
    3293227
  • Title

    Electrostatic voltage sensor and displacement sensor, using SAW directional coupler

  • Author

    Ishido, M. ; Ojima, K. ; Kikuta, N.

  • Author_Institution
    Fac. of Eng., Kobe Univ., Japan
  • fYear
    1991
  • fDate
    8-11 Dec 1991
  • Firstpage
    341
  • Abstract
    It is shown experimentally that a surface acoustic wave (SAW) directional coupler can be used as an electrostatic voltage sensor and as a displacement sensor. The sensitivity of the electrostatic voltage sensor is 45 Hz mm/V in the case of a waveguide gap of 0.4 mm. It is possible to increase the sensitivity by making the pitch of the IDT smaller and increasing the oscillation frequency. The sensitivity of the displacement sensor has a high value of 3.3×104 Hz/mm, but the existence of the mode jumps has to be taken into account
  • Keywords
    directional couplers; surface acoustic wave devices; voltage measurement; SAW directional coupler; displacement sensor; electrostatic voltage sensor; sensitivity; waveguide gap; Directional couplers; Electrostatics; Frequency; Joining processes; Oscillators; Surface acoustic waves; Surface waves; Voltage; Waveguide discontinuities; Waveguide transitions;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 1991. Proceedings., IEEE 1991
  • Conference_Location
    Orlando, FL
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1991.234182
  • Filename
    234182
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3293227