Title :
Mems: What Lies Ahead?
Author_Institution :
Stanford University
Keywords :
Actuators; Automotive engineering; Commercialization; History; Investments; Micromechanical devices; Production; Research and development; Solid state circuits; Vehicle dynamics;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717377
