Title :
A Dynamic Method for Optimal WIP Allocation and Control in a Semiconductor Manufacturing System
Author :
Liu, Chih-Ming ; Kuo, Chung-Jen ; Chi, Chih-Yang
Author_Institution :
Nat. Tsing Hua Univ., Hsinchu
Abstract :
The required total WIP level of the semiconductor manufacturing system is estimated by using neural networks, and then the total number of WIP is allocated to each workstation and operation by using the queuing model. The resulting WIP level for each operation is then used to control the manufacturing system. The simulation results show that the proposed method for allocating total WIP to each workstation and operation can reduce 16% of mean cycle time and not increase the variation of cycle time for the manufacturing system.
Keywords :
neural nets; production engineering computing; queueing theory; semiconductor device manufacture; neural networks; optimal WIP allocation; queuing model; semiconductor manufacturing system; Analytical models; Control systems; Fabrication; Manufacturing systems; Neural networks; Optimal control; Semiconductor device manufacture; Semiconductor device modeling; Throughput; Workstations; WIP; cycle time; neural networks; queuing model;
Conference_Titel :
Semiconductor Manufacturing, 2006. ISSM 2006. IEEE International Symposium on
Conference_Location :
Tokyo
Print_ISBN :
978-4-9904138-0-4
DOI :
10.1109/ISSM.2006.4493023
