• DocumentCode
    3293319
  • Title

    Study of new novel FinFET device with its bodies been connected

  • Author

    Lin, Jyi-Tsong ; Lin, Po-Hsieh ; Eng, Yi-Chuen

  • Author_Institution
    Dept. of Electr. Eng., Nat. Sun Yat-Sen Univ., Kaohsiung
  • fYear
    2009
  • fDate
    18-20 March 2009
  • Firstpage
    333
  • Lastpage
    336
  • Abstract
    In this paper, novel FinFET device structures with its bodies been connected together have been for the first time proposed by three-dimensional (3-D) simulation. The short-channel characteristics of threshold voltage (VTH), drain induced barrier lowering (DIBL), and on-off ratio current performance have been examined and explained in this paper. Also, the novel structures show the desired characteristic performance when using different kind of wafer, such as bulk wafer and silicon on insulator (SOI) wafer. Our proposed devices can not only lower the VTH, but also reduce the leakage current due to its active body been connected. In addition, it can also help us to develop a new low cost fabrication technology for the future technology node.
  • Keywords
    MOSFET; leakage currents; semiconductor process modelling; FinFET device; Si; bulk wafer; drain induced barrier lowering; leakage current; on-off ratio current performance; short-channel characteristics; silicon-on-insulator wafer; three-dimensional simulation; threshold voltage; CMOS technology; Controllability; Electrons; FinFETs; Lattices; Leakage current; MOSFET circuits; Silicon on insulator technology; Temperature; Threshold voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultimate Integration of Silicon, 2009. ULIS 2009. 10th International Conference on
  • Conference_Location
    Aachen
  • Print_ISBN
    978-1-4244-3704-7
  • Type

    conf

  • DOI
    10.1109/ULIS.2009.4897603
  • Filename
    4897603