DocumentCode
3293319
Title
Study of new novel FinFET device with its bodies been connected
Author
Lin, Jyi-Tsong ; Lin, Po-Hsieh ; Eng, Yi-Chuen
Author_Institution
Dept. of Electr. Eng., Nat. Sun Yat-Sen Univ., Kaohsiung
fYear
2009
fDate
18-20 March 2009
Firstpage
333
Lastpage
336
Abstract
In this paper, novel FinFET device structures with its bodies been connected together have been for the first time proposed by three-dimensional (3-D) simulation. The short-channel characteristics of threshold voltage (VTH), drain induced barrier lowering (DIBL), and on-off ratio current performance have been examined and explained in this paper. Also, the novel structures show the desired characteristic performance when using different kind of wafer, such as bulk wafer and silicon on insulator (SOI) wafer. Our proposed devices can not only lower the VTH, but also reduce the leakage current due to its active body been connected. In addition, it can also help us to develop a new low cost fabrication technology for the future technology node.
Keywords
MOSFET; leakage currents; semiconductor process modelling; FinFET device; Si; bulk wafer; drain induced barrier lowering; leakage current; on-off ratio current performance; short-channel characteristics; silicon-on-insulator wafer; three-dimensional simulation; threshold voltage; CMOS technology; Controllability; Electrons; FinFETs; Lattices; Leakage current; MOSFET circuits; Silicon on insulator technology; Temperature; Threshold voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Ultimate Integration of Silicon, 2009. ULIS 2009. 10th International Conference on
Conference_Location
Aachen
Print_ISBN
978-1-4244-3704-7
Type
conf
DOI
10.1109/ULIS.2009.4897603
Filename
4897603
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