Design and realization of grating target coordinate sensors

Against the problem of calibration scheme existing in the grating target, photoelectric coordinate sensors are applied. By describing principle of photoelectric coordinate sensors detailly, linearization design for network and emendation has been done, gaing the preferably improving effect. By experimental results proved that the scheme design of the coordinate sensor has been optimized, and parameter selected is reasonable, the design index is practical, with advantages of simple principle, high precision, low cost and the test precision is effectively improved.