Title :
Micromachined ultrasonic materials
Author :
Haller, M.I. ; Khuri-Yakub, B.T.
Author_Institution :
Edward L. Ginzton Lab., Stanford Univ., CA, USA
Abstract :
Ultrasonic matching layers are necessary for efficient coupling between piezoelectric ceramics and either air or water. Current materials are formed by suspending particles in an epoxy matrix. A technique using silicon micromachining techniques and IC fabrication technology to build low-loss, high-purity, and controllable acoustic matching layers is proposed. The performance of micromachined matching layers was measured and compared with theory. With this technique it is possible to fabricate ultrasonic matching layers with impedances between 0.02 and 20 MRayls for operation at frequencies between 1 and 200 MHz
Keywords :
acoustic materials; piezoelectric transducers; ultrasonic transducers; 1 to 200 MHz; IC fabrication technology; Si; acoustic matching layers; coupling; epoxy matrix; high-purity; impedances; low-loss; micromachined ultrasonic materials; performance; piezoelectric ceramics; ultrasonic matching layers; Acoustic measurements; Ceramics; Epoxy resins; Etching; Fabrication; Gratings; Impedance; Micromachining; Piezoelectric transducers; Silicon;
Conference_Titel :
Ultrasonics Symposium, 1991. Proceedings., IEEE 1991
Conference_Location :
Orlando, FL
DOI :
10.1109/ULTSYM.1991.234195
