Title :
Progress in understanding liquid-metal ion source operation
Author :
Forbes, Richard G. ; Djuric, Zoran
Author_Institution :
Dept. of Electron. & Electr. Eng., Surrey Univ., Guildford, UK
Abstract :
The liquid metal ion source (LMIS) has many practical applications. Better understanding of its behaviour could lead to design improvements and to clearer interpretation of experimental results. The LMIS is also a fascinating device involving some very complex physics. This paper describes some recent improvements in our understanding of how the LMIS works
Keywords :
field ion emission; ion sources; liquid metal ion sources; liquid metals; LMIS; Taylor-Gilbert cones; complex physics; conical shape; design improvements; liquid-metal ion source operation; Elementary particle vacuum; Ion emission; Ion sources; Laplace equations; Physics; Shape; Surface tension; Surface treatment; Thermodynamics; Vacuum systems;
Conference_Titel :
Vacuum Microelectronics Conference, 1996. IVMC'96., 9th International
Conference_Location :
St. Petersburg
Print_ISBN :
0-7803-3594-5
DOI :
10.1109/IVMC.1996.601866
