Title :
Affirmation of minority carrier lifetime during industrial process of crystalline silicon solar cell by microwave phtonconductance decay method
Author :
Meng, X.J. ; Ma, Z.Q. ; Lv, P. ; Yu, Z.S. ; Li, F.
Author_Institution :
Dept. of Phys., Shanghai Univ., Baoshan, China
Abstract :
Minority carrier lifetime was determined by MW-PCD method following the industry process well and truly. The wafer as-cut without any treatment showed an effective lifetime about 1.2mus. Then it rose to 2.5~5mus after one side was passivated by silicon nitride. The average lifetime with double layer passivation sharply increased to 48mus average, even over 100mus locally. The escape of hydrogen was discovered after sintering. The electron collection ability between Ag and Al was also compared by effective lifetime testing.
Keywords :
carrier lifetime; elemental semiconductors; life testing; minority carriers; passivation; silicon; silicon compounds; sintering; solar cells; Si; crystalline silicon solar cell; double layer passivation; electron collection; industrial process; lifetime testing; microwave phtonconductance decay method; minority carrier lifetime; silicon nitride; sintering; Charge carrier density; Charge carrier lifetime; Crystallization; Diffusion processes; Masers; Microwave theory and techniques; Passivation; Photoconductivity; Photovoltaic cells; Silicon;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits, 2009. IPFA 2009. 16th IEEE International Symposium on the
Conference_Location :
Suzhou, Jiangsu
Print_ISBN :
978-1-4244-3911-9
Electronic_ISBN :
1946-1542
DOI :
10.1109/IPFA.2009.5232595