Title :
High temperature field evaporation of the Hf-Mo alloy
Author :
Loginov, M.V. ; Shrednik, V.N.
Author_Institution :
A.F. Ioffe Physicotech. Inst., Acad. of Sci., St. Petersburg, Russia
Abstract :
Atom probe study of the high temperature field evaporation of Hf(15 weight %)-Mo alloy has been carried out in the temperature range from 1300 to 1850 K. The microprotrusions, moving and fluctuating have been visualized by means of host field evaporated ions. In spite of the high amount of Mo in the alloy the atom probe mass-spectra revealed typically two main peaks: Hf+++ and Hf2+++ . Depending on the temperature and electric field the monomer or dimer Hf-peaks were more or less pronounced. On the base of high temperature field evaporation of this alloy a point ion source of Hf, useful in nanotechnology, can be created
Keywords :
atom probe field ion microscopy; field evaporation; field ion emission; hafnium alloys; ion sources; molybdenum alloys; surface topography; vacuum microelectronics; 1300 to 1500 K; Hf-Mo; atom probe study; high temperature field evaporation; microprotrusions; nanotechnology; point ion source; Hafnium; Ion sources; Nanotechnology; Probes; Shape; Surface tension; Temperature dependence; Temperature distribution; Visualization; Voltage;
Conference_Titel :
Vacuum Microelectronics Conference, 1996. IVMC'96., 9th International
Conference_Location :
St. Petersburg
Print_ISBN :
0-7803-3594-5
DOI :
10.1109/IVMC.1996.601868