Title :
In-situ observation and formation mechanism of aluminum voiding
Author :
Sugano, Y. ; Minegishi, S. ; Sumi, H. ; Itabashi, M.
Author_Institution :
Sony Corp., Atsugi, Japan
Abstract :
An in situ observation equipment was used to investigate aluminum void formation. It was found that the voids are formed during heating and are hardly changed during cooling. The void growth can be described by an equation in which the total number of voids saturates to a certain value as a function of heating time. The passivation swelling as a causative mechanism was confirmed with an actual trace of the material´s surface and by a finite-element simulation
Keywords :
aluminium; metallisation; passivation; reliability; voids (solid); Al; Al void formation; finite-element simulation; heating; in situ observation; interconnection; passivation swelling; void growth; Aluminum; Cooling; Equations; Finite element methods; Heating; Optical films; Optical microscopy; Optical recording; Passivation; Silicon compounds; Temperature; Thermal stresses;
Conference_Titel :
Reliability Physics Symposium 1988. 26th Annual Proceedings., International
Conference_Location :
Monterey, CA
DOI :
10.1109/RELPHY.1988.23422
