• DocumentCode
    3294036
  • Title

    Development of Slow Start Safety Cylinder Valve to Inhibit Adiabatic Compression for Oxidized Gases

  • Author

    Orita, Takashi ; Yamaji, Michio ; Shinohara, Tsutomu ; Nakata, Tomohiro ; Koizumi, Masao ; Hasaka, Satoshi ; Nakabayashi, Hiroyuki

  • Author_Institution
    Taiyo Nippon Sanso Co., Kanagawa
  • fYear
    2006
  • fDate
    25-27 Sept. 2006
  • Firstpage
    235
  • Lastpage
    238
  • Abstract
    Slow start safety cylinder valve (S3V) has been developed to inhibit adiabatic compression. S3V can control to increase the pressure slower than conventional pneumatic valve (PV) during the secondary pressure goes up, so that it can inhibit adiabatic compression and decomposition of oxidized gases. We have confirmed that S3V achieved lower temperature than PV by adiabatic compression theoretically and experimentally. Therefore, S3V is convenient to secure from accidents for oxidized gases in semiconductor fabs.
  • Keywords
    safety devices; semiconductor device manufacture; valves; adiabatic compression; oxidized gases; semiconductor fabs; slow start safety cylinder valve; Accidents; Actuators; Explosions; Fires; Gases; Motion control; Pressure control; Safety; Temperature; Valves;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Manufacturing, 2006. ISSM 2006. IEEE International Symposium on
  • Conference_Location
    Tokyo
  • ISSN
    1523-553X
  • Print_ISBN
    978-4-9904138-0-4
  • Type

    conf

  • DOI
    10.1109/ISSM.2006.4493071
  • Filename
    4493071
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3294036