Limitations to estimating yield based on in-line defect measurements

Author

Riley, Stuart L.

Author_Institution

KLA-Tencor Corp., USA

fYear

1999

fDate

36465

Firstpage

46

Lastpage

54

Abstract

To estimate yield loss based on data from in-line defect measurements, certain assumptions must be made so the data can be made to fit a given yield model. For the assumptions to be credible, inherent limitations due to detection, review sampling, and classification groupings must be understood and dealt with. Methodologies such as correlations of in-line measurement data to test data can be misinterpreted if issues such as multiple-failed die are not considered. This paper discusses some of the inherent limitations of in-line measurements and how they can affect the intended outcome of yield estimations

Keywords

Poisson distribution; binomial distribution; failure analysis; fault diagnosis; inspection; integrated circuit modelling; integrated circuit yield; pattern classification; Poisson distribution model; classification groupings; defect review sampling; detection; in-line defect measurements; in-line measurement data correlations; inherent limitations; kill ratio; multiple-failed die; negative binomial model; pattern inspection equipment; yield loss estimation; yield model; Bridges; Inspection; Loss measurement; Measurement techniques; Microscopy; Monitoring; Sampling methods; Semiconductor device manufacture; Testing; Yield estimation;

fLanguage

English

Publisher

ieee

Conference_Titel

Defect and Fault Tolerance in VLSI Systems, 1999. DFT '99. International Symposium on

Conference_Location

Albuquerque, NM

ISSN

1550-5774

Print_ISBN

0-7695-0325-x

Type

conf

DOI

10.1109/DFTVS.1999.802868

Filename

802868