Field desorption point source of alkali and alkaline-earth metal ions

Author

Bernatskii, D.P. ; Pavlov, V.G.

Author_Institution

A.F. Ioffe Physicotech. Inst., Acad. of Sci., St. Petersburg, Russia

fYear

1996

fDate

7-12 Jul 1996

Firstpage

484

Lastpage

486

Abstract

A field desorption point source of metal ions is explored. A continuous or pulse flux of Na, Cs and Ba ions from the W and Ir field emitter is achieved. The continuous flux of ions is realized when under certain conditions surface diffusion flux of adatoms to the apex of a tip is equal to desorption flux. The ion current was 0.001-0.1 nA. The ion current density in pulse (10 ns) amounted to 10³ A/cm². Size of emission area can be changed from ~1 mcm to ~1 nm by varying conditions of desorption. The point source of metal ions can be used in ultra high vacuum installations

Keywords

barium; caesium; desorption; field ion emission; ion beams; ion emission; ion sources; positive ions; sodium; surface diffusion; 0.001 to 0.01 nA; 10 ns; Ba; Cs; Ir; Na; W; alkali metal ions; alkaline-earth metal ions; continuous flux; desorption flux; emission area size; field desorption point source; field emitter; ion current density; ion emission; pulse flux; surface diffusion flux of adatoms; tip apex; ultrahigh vacuum installations; Current density; Electric variables measurement; Ion beams; Ion emission; Ion sources; Microelectronics; Microscopy; Tungsten;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1996. IVMC'96., 9th International

Conference_Location

St. Petersburg

Print_ISBN

0-7803-3594-5

Type

conf

DOI

10.1109/IVMC.1996.601870

Filename

601870