Title :
Field desorption point source of alkali and alkaline-earth metal ions
Author :
Bernatskii, D.P. ; Pavlov, V.G.
Author_Institution :
A.F. Ioffe Physicotech. Inst., Acad. of Sci., St. Petersburg, Russia
Abstract :
A field desorption point source of metal ions is explored. A continuous or pulse flux of Na, Cs and Ba ions from the W and Ir field emitter is achieved. The continuous flux of ions is realized when under certain conditions surface diffusion flux of adatoms to the apex of a tip is equal to desorption flux. The ion current was 0.001-0.1 nA. The ion current density in pulse (10 ns) amounted to 103 A/cm2. Size of emission area can be changed from ~1 mcm to ~1 nm by varying conditions of desorption. The point source of metal ions can be used in ultra high vacuum installations
Keywords :
barium; caesium; desorption; field ion emission; ion beams; ion emission; ion sources; positive ions; sodium; surface diffusion; 0.001 to 0.01 nA; 10 ns; Ba; Cs; Ir; Na; W; alkali metal ions; alkaline-earth metal ions; continuous flux; desorption flux; emission area size; field desorption point source; field emitter; ion current density; ion emission; pulse flux; surface diffusion flux of adatoms; tip apex; ultrahigh vacuum installations; Current density; Electric variables measurement; Ion beams; Ion emission; Ion sources; Microelectronics; Microscopy; Tungsten;
Conference_Titel :
Vacuum Microelectronics Conference, 1996. IVMC'96., 9th International
Conference_Location :
St. Petersburg
Print_ISBN :
0-7803-3594-5
DOI :
10.1109/IVMC.1996.601870
