Title :
Atom probe determination of the multicomponent material thermo-field microprotrusion parameters
Author :
Kontorovich, E.L. ; Loginov, M.V. ; Shrednik, V.N.
Author_Institution :
A.F. Ioffe Physicotech. Inst., Acad. of Sci., St. Petersburg, Russia
Abstract :
Chemical composition and some field electron and ion emission characteristics of thermo-field formations of two alloys Ir-Rh (60% Rh) and W-Hf (3% Hf) have been studied by time of flight atom probe. A remarkable segregation of Rh on the surface of Ir-Rh alloy have been proved at different cases. Such parameters as field evaporation fields have been determined. Field electron emission of some thermo-field formation on Ir-Rh alloy has been investigated. High temperature field evaporation has been studied for the W-Hf alloy and some enrichment of evaporating flow by Hf is supposed
Keywords :
atom probe field ion microscopy; electron field emission; field evaporation; field ion emission; hafnium alloys; ion emission; iridium alloys; mass spectroscopic chemical analysis; rhodium alloys; surface diffusion; surface segregation; time of flight mass spectra; tungsten alloys; Ir-Rh; TOF atom probe determination; W-Hf; chemical composition; field electron emission; field evaporation fields; field ion emission; high temperature field evaporation; mass spectra; multicomponent material; surface segregation; thermo-field microprotrusion parameters; Chemicals; Cleaning; Composite materials; Crystallization; Electron emission; Hafnium; Ion emission; Probes; Surface treatment; Temperature;
Conference_Titel :
Vacuum Microelectronics Conference, 1996. IVMC'96., 9th International
Conference_Location :
St. Petersburg
Print_ISBN :
0-7803-3594-5
DOI :
10.1109/IVMC.1996.601871
