Title :
Analysis and experiment of surface bending to grating light modulator
Author :
Shi, Lingna ; Pan, Yingjin ; Zhang, Zhihai ; Zhang, Jie ; Weiwei ; Wang, Wei
Author_Institution :
Eng. Dept., Chongqing Univ., Chongqing, China
Abstract :
The effects of diffraction characteristics that the surface bending to two dimension grating light modulators is discussed in this paper. With consideration of surface bending, a corresponding model is built based on experimental data, and then the effects of different bending to the modulation results have been calculated which is testified by experiments.
Keywords :
bending; diffraction gratings; micro-optomechanical devices; optical modulation; MOEMS; diffraction characteristic effect; optical microelectromechanical system; surface bending; two dimension grating light modulator; Diffraction gratings; Displays; Equations; Mirrors; Optical diffraction; Optical filters; Optical materials; Optical modulation; Surface fitting; Surface morphology;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits, 2009. IPFA 2009. 16th IEEE International Symposium on the
Conference_Location :
Suzhou, Jiangsu
Print_ISBN :
978-1-4244-3911-9
Electronic_ISBN :
1946-1542
DOI :
10.1109/IPFA.2009.5232639
