DocumentCode
3294564
Title
Analysis and experiment of surface bending to grating light modulator
Author
Shi, Lingna ; Pan, Yingjin ; Zhang, Zhihai ; Zhang, Jie ; Weiwei ; Wang, Wei
Author_Institution
Eng. Dept., Chongqing Univ., Chongqing, China
fYear
2009
fDate
6-10 July 2009
Firstpage
327
Lastpage
330
Abstract
The effects of diffraction characteristics that the surface bending to two dimension grating light modulators is discussed in this paper. With consideration of surface bending, a corresponding model is built based on experimental data, and then the effects of different bending to the modulation results have been calculated which is testified by experiments.
Keywords
bending; diffraction gratings; micro-optomechanical devices; optical modulation; MOEMS; diffraction characteristic effect; optical microelectromechanical system; surface bending; two dimension grating light modulator; Diffraction gratings; Displays; Equations; Mirrors; Optical diffraction; Optical filters; Optical materials; Optical modulation; Surface fitting; Surface morphology;
fLanguage
English
Publisher
ieee
Conference_Titel
Physical and Failure Analysis of Integrated Circuits, 2009. IPFA 2009. 16th IEEE International Symposium on the
Conference_Location
Suzhou, Jiangsu
ISSN
1946-1542
Print_ISBN
978-1-4244-3911-9
Electronic_ISBN
1946-1542
Type
conf
DOI
10.1109/IPFA.2009.5232639
Filename
5232639
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