Title :
Using product test data for manufacturing process control
Author :
Spitzlsperger, Gerhard ; Frick, Matthias ; Rathei, Dieter
Author_Institution :
Renesas Semicond. Eur. GmbH, Landshut
Abstract :
A new software tool, YieldWatchDogtrade for monitoring all electrical test parameters was evaluated. The scope of this tool is to control all electrical test parameters and to detect early warning signals for yield degradation. Although no yield degradation occurred during the evaluation time period, the usefulness of the tool could be demonstrated using historical data.
Keywords :
computerised monitoring; production control; production engineering computing; semiconductor device manufacture; YieldWatchDog; detect early warning signals; manufacturing process control; product test data; software tool; Condition monitoring; Data engineering; Degradation; Manufacturing automation; Manufacturing processes; Process control; Semiconductor device testing; Software testing; Software tools; Test equipment;
Conference_Titel :
Semiconductor Manufacturing, 2006. ISSM 2006. IEEE International Symposium on
Conference_Location :
Tokyo
Print_ISBN :
978-4-9904138-0-4
DOI :
10.1109/ISSM.2006.4493109
