DocumentCode
3294682
Title
Using product test data for manufacturing process control
Author
Spitzlsperger, Gerhard ; Frick, Matthias ; Rathei, Dieter
Author_Institution
Renesas Semicond. Eur. GmbH, Landshut
fYear
2006
fDate
25-27 Sept. 2006
Firstpage
368
Lastpage
370
Abstract
A new software tool, YieldWatchDogtrade for monitoring all electrical test parameters was evaluated. The scope of this tool is to control all electrical test parameters and to detect early warning signals for yield degradation. Although no yield degradation occurred during the evaluation time period, the usefulness of the tool could be demonstrated using historical data.
Keywords
computerised monitoring; production control; production engineering computing; semiconductor device manufacture; YieldWatchDog; detect early warning signals; manufacturing process control; product test data; software tool; Condition monitoring; Data engineering; Degradation; Manufacturing automation; Manufacturing processes; Process control; Semiconductor device testing; Software testing; Software tools; Test equipment;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing, 2006. ISSM 2006. IEEE International Symposium on
Conference_Location
Tokyo
ISSN
1523-553X
Print_ISBN
978-4-9904138-0-4
Type
conf
DOI
10.1109/ISSM.2006.4493109
Filename
4493109
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