DocumentCode
3294710
Title
ISMI Victory: Interface A Ready for Manufacturing
Author
Wohlwend, Harvey
Author_Institution
ISMI Austin, Austin
fYear
2006
fDate
25-27 Sept. 2006
Firstpage
375
Lastpage
378
Abstract
Productivity gains resulting from larger wafers, smaller device features, and 90% and greater yields are now assumed. Hence, equipment utilization and manufacturing effectiveness have become targets for further improvement. Because productivity can be improved by access to additional equipment and factory data, ISMI´s e-Manufacturing initiative has focused on data acquisition to enable factories to become capable of data-driven, real-time, automated decision-making. IC makers need these types of factories to support shrinking feature sizes and to increase overall factory productivity. This paper describes a series of steps ISMI used to prepare the industry for implementing a second data port, interface A.
Keywords
data acquisition; decision making; integrated circuit manufacture; production engineering computing; production equipment; IC factory; ISMI; International SEMATECH Manufacturing Initiative; automated decision-making; data acquisition; e-Manufacturing; equipment utilization; factory productivity; manufacturing effectiveness; Acceleration; Data acquisition; Decision making; Integrated circuit modeling; Manufacturing automation; Manufacturing processes; Process control; Production facilities; Productivity; XML;
fLanguage
English
Publisher
ieee
Conference_Titel
Semiconductor Manufacturing, 2006. ISSM 2006. IEEE International Symposium on
Conference_Location
Tokyo
ISSN
1523-553X
Print_ISBN
978-4-9904138-0-4
Type
conf
DOI
10.1109/ISSM.2006.4493111
Filename
4493111
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