• DocumentCode
    3294710
  • Title

    ISMI Victory: Interface A Ready for Manufacturing

  • Author

    Wohlwend, Harvey

  • Author_Institution
    ISMI Austin, Austin
  • fYear
    2006
  • fDate
    25-27 Sept. 2006
  • Firstpage
    375
  • Lastpage
    378
  • Abstract
    Productivity gains resulting from larger wafers, smaller device features, and 90% and greater yields are now assumed. Hence, equipment utilization and manufacturing effectiveness have become targets for further improvement. Because productivity can be improved by access to additional equipment and factory data, ISMI´s e-Manufacturing initiative has focused on data acquisition to enable factories to become capable of data-driven, real-time, automated decision-making. IC makers need these types of factories to support shrinking feature sizes and to increase overall factory productivity. This paper describes a series of steps ISMI used to prepare the industry for implementing a second data port, interface A.
  • Keywords
    data acquisition; decision making; integrated circuit manufacture; production engineering computing; production equipment; IC factory; ISMI; International SEMATECH Manufacturing Initiative; automated decision-making; data acquisition; e-Manufacturing; equipment utilization; factory productivity; manufacturing effectiveness; Acceleration; Data acquisition; Decision making; Integrated circuit modeling; Manufacturing automation; Manufacturing processes; Process control; Production facilities; Productivity; XML;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Manufacturing, 2006. ISSM 2006. IEEE International Symposium on
  • Conference_Location
    Tokyo
  • ISSN
    1523-553X
  • Print_ISBN
    978-4-9904138-0-4
  • Type

    conf

  • DOI
    10.1109/ISSM.2006.4493111
  • Filename
    4493111