The efficiency to convert electrical to mechanical energy of a piezoelectric on silicon bimorph micromotor

Author

Smits, Jan G. ; Choi, Wai-shing ; Cooney, Tom K.

Author_Institution

Dept. of Electr. Comput. & Syst. Eng., Boston Univ., MA, USA

fYear

1991

fDate

8-11 Dec 1991

Firstpage

1019

Abstract

It is shown that the effectiveness of a heterogeneous bimorph in converting electrical energy into mechanical work is a function of the piezoelectric coupling factor, the thickness ratio and the elastic compliance ratio between the nonpiezoelectric and piezoelectric material comprising the bimorph. It is found that the heterogeneous bimorph has the largest effectiveness in performing work against a constant load applied as a moment. Effectiveness of the bimorph in performing work against a constant load applied as a force at the free end is larger than that of an applied pressure

Keywords

micromechanical devices; piezoelectric actuators; piezoelectric motors; small electric machines; Si bimorph; constant load; elastic compliance ratio; energy conversion efficiency; heterogeneous bimorph; piezoelectric coupling factor; piezoelectric on bimorph micromotor; thickness ratio; work performance; Displays; Equations; Gravity; Mechanical energy; Micromotors; Power engineering and energy; Silicon; Springs; Systems engineering and theory; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1991. Proceedings., IEEE 1991

Conference_Location

Orlando, FL

Type

conf

DOI

10.1109/ULTSYM.1991.234269

Filename

234269