• DocumentCode
    3295053
  • Title

    A Criterion for Applying Countermeasure to the Electrostatic Charging Issue of Wafer Probers

  • Author

    Furuhashi, Fumiyoshi ; Yago, Hitoshi ; Kagawa, Tatsuya ; Yamaguchi, Jyunichi ; Furuichi, Osamu ; Imaoka, Kazunori ; Houkida, Takahiro

  • Author_Institution
    Spansion Japan Co. Ltd., Aizuwakamatu
  • fYear
    2006
  • fDate
    25-27 Sept. 2006
  • Firstpage
    447
  • Lastpage
    449
  • Abstract
    There are many troubles, which are caused by electrostatic charging. In this time, we investigated the charging issues on wafer probers. And, we found out a parameter to distinguish the probers, which would have the charging issues. Thus, we make a criterion successfully for decision whether we will apply countermeasures to the probers or not.
  • Keywords
    electrostatic discharge; microelectrodes; probes; countermeasures application; criterion; electrostatic charging; wafer probers; Dielectric films; Electric breakdown; Electrostatics; Ink; Integrated circuit testing; Needles; Probes; Voltage measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconductor Manufacturing, 2006. ISSM 2006. IEEE International Symposium on
  • Conference_Location
    Tokyo
  • ISSN
    1523-553X
  • Print_ISBN
    978-4-9904138-0-4
  • Type

    conf

  • DOI
    10.1109/ISSM.2006.4493132
  • Filename
    4493132
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3295053