Title :
A Criterion for Applying Countermeasure to the Electrostatic Charging Issue of Wafer Probers
Author :
Furuhashi, Fumiyoshi ; Yago, Hitoshi ; Kagawa, Tatsuya ; Yamaguchi, Jyunichi ; Furuichi, Osamu ; Imaoka, Kazunori ; Houkida, Takahiro
Author_Institution :
Spansion Japan Co. Ltd., Aizuwakamatu
Abstract :
There are many troubles, which are caused by electrostatic charging. In this time, we investigated the charging issues on wafer probers. And, we found out a parameter to distinguish the probers, which would have the charging issues. Thus, we make a criterion successfully for decision whether we will apply countermeasures to the probers or not.
Keywords :
electrostatic discharge; microelectrodes; probes; countermeasures application; criterion; electrostatic charging; wafer probers; Dielectric films; Electric breakdown; Electrostatics; Ink; Integrated circuit testing; Needles; Probes; Voltage measurement;
Conference_Titel :
Semiconductor Manufacturing, 2006. ISSM 2006. IEEE International Symposium on
Conference_Location :
Tokyo
Print_ISBN :
978-4-9904138-0-4
DOI :
10.1109/ISSM.2006.4493132
