Title :
On the problem of planar edge arrays as basic emitting structures for vacuum microelectronics
Author :
Petrov, Evgeny N.
Author_Institution :
Res. & Dev. Inst. Volga, Saratov, Russia
Abstract :
The concepts of multilayered (minimum 6 layers) planar edge arrays (PEAs) as the most promising emitting structures for vacuum microelectronics are developed. New PEA variants featuring high frequency operation (of emission control), reliability (of spacer layers) and other advantages are described, the results of simulation of such structures are presented
Keywords :
electron field emission; reliability; vacuum microelectronics; emission control; emitting structures; high frequency operation; planar edge arrays; reliability; spacer layers; vacuum microelectronics; Electrodes; Electron emission; Frequency; Low voltage; Mass production; Microelectronics; Space technology; Thickness control; Threshold voltage; Voltage control;
Conference_Titel :
Vacuum Microelectronics Conference, 1996. IVMC'96., 9th International
Conference_Location :
St. Petersburg
Print_ISBN :
0-7803-3594-5
DOI :
10.1109/IVMC.1996.601876
