Nano-Pattering on the Basis of Germanium Compositions Using Scanning Probe Microscopy

Author

Astankova, Kseniya N. ; Gorokhov, Evgeny B. ; Sheglov, Dmitry V. ; Volodin, Vladimir A. ; Latyshev, Alexander V. ; Aseev, Alexander L.

Author_Institution

Novosibirsk State Tech. Univ., Novosibirsk

fYear

2007

fDate

June 1 2007-July 5 2007

Firstpage

86

Lastpage

87

Abstract

The possibility of formation of Ge-based nanowires with lateral resolution up to several nanometers using modification of GeO films by scanning probe microscope was demonstrated for the first time. The main advantage of used germanium monoxide films is its meta-stability and decomposition on Ge and GeO₂ under impact of atomic force microscope probe.

Keywords

germanium compounds; nanopatterning; nanowires; scanning probe microscopy; semiconductor thin films; Ge; GeO; atomic force microscope probe; decomposition; germanium based nanowires; germanium compositions; meta-stability; nanopatterning; scanning probe microscopy; semiconductor thin films; Atomic force microscopy; Conductive films; Germanium; Lithography; Nanostructures; Nanowires; Optical films; Scanning probe microscopy; Silicon; Substrates; Germanium oxide; atomic force microscope; germanium nanowires;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices and Materials, 2007. EDM '07. 8th Siberian Russian Workshop and Tutorial on

Conference_Location

Erlagol, Altai

ISSN

1815-3712

Print_ISBN

978-5-7782-0752-3

Type

conf

DOI

10.1109/SIBEDM.2007.4292918

Filename

4292918