Title :
Computation of Temperature Distribution into Test Structure of Microsystem Heat Flux Sensor
Author :
Fomenko, Svetlana V. ; Dikareva, Regina P. ; Lobach, Oleg V.
Author_Institution :
Novosibirsk State Tech. Univ., Novosibirsk
fDate :
June 1 2007-July 5 2007
Abstract :
In the article the test structure of the microsystem heat flux sensor is presented. Computation methods of temperature distribution which allow counting output parameters and a sensitivity of the heat flux sensor are considered. Results of a numerical modeling and their comparison with an analytical computation of a temperature distribution in the sensor are given.
Keywords :
finite element analysis; heat transfer; temperature sensors; counting output parameters; finite element analysis; microsystem heat flux sensor; numerical modeling; temperature distribution computation; test structure; Distributed computing; Finite element methods; Heating; Resistors; Temperature distribution; Temperature sensors; Testing; Thermal conductivity; Thermal sensors; Voltage; a heat flux sensor; finite-element analysis; temperature distribution modeling; thermo-EMF;
Conference_Titel :
Electron Devices and Materials, 2007. EDM '07. 8th Siberian Russian Workshop and Tutorial on
Conference_Location :
Erlagol, Altai
Print_ISBN :
978-5-7782-0752-3
DOI :
10.1109/SIBEDM.2007.4292929
