Title :
Magnetic properties of Fe-Si thin films sputtered in mixed gas atmospheres
Author :
Arai, K.I. ; Yamaguchi, M. ; Hayashi, Y. ; Murakami, Kazuki
Author_Institution :
Tohoku Univ.
Keywords :
Atmosphere; Crystallization; Grain size; Magnetic films; Magnetic properties; Oxygen; Sputtering;
Conference_Titel :
Magnetics Conference, 1989. Digests of INTERMAG '89., International
Conference_Location :
Washington, DC, USA
DOI :
10.1109/INTMAG.1989.690266
