Magnetic properties of Fe-Si thin films sputtered in mixed gas atmospheres

Author

Arai, K.I. ; Yamaguchi, M. ; Hayashi, Y. ; Murakami, Kazuki

Author_Institution

Tohoku Univ.

fYear

1989

fDate

28-31 March 1989

Keywords

Atmosphere; Crystallization; Grain size; Magnetic films; Magnetic properties; Oxygen; Sputtering;

fLanguage

English

Publisher

ieee

Conference_Titel

Magnetics Conference, 1989. Digests of INTERMAG '89., International

Conference_Location

Washington, DC, USA

Type

DOI

10.1109/INTMAG.1989.690266

Filename

690266

Link To Document