DocumentCode

3295850

Title

Aluminum planar thin film inductors

Author

Surganov, V. ; Gorokh, G. ; Tochitskij, E.

Author_Institution

Radio Engineering Institute

fYear

1989

fDate

28-31 March 1989

Keywords

Aluminum; Coils; Conductors; Copper; Dielectric losses; Dielectric thin films; Frequency; Inductance; Q factor; Thin film inductors;

fLanguage

English

Publisher

ieee

Conference_Titel

Magnetics Conference, 1989. Digests of INTERMAG '89., International

Conference_Location

Washington, DC, USA

Type

conf

DOI

10.1109/INTMAG.1989.690274

Filename

690274