Title :
Influence of copper contamination on contact quality between gold wire and Nickel-Palladium bond pad through X-ray photoelectron spectroscopy
Author :
Lew, L.F. ; Lau, A.N.L.
Author_Institution :
Failure Anal., Micron Semicond. Asia Pte Ltd., Singapore, Singapore
Abstract :
Wire bonding failures were observed on the copper bond pad with Nickel-Palladium (NiPd) surface. To understand the copper effect on the bondability of gold wire onto the NiPd pad, X-ray photoelectron spectroscopy (XPS) analysis was carried out. Results showed that significant presence of Cu 2p (in relative concentration) on the pad surface can potentially introduce adverse effect on wire bondability. Sputter depth profiles indicated that determining Cu 2p layer thickness on the bond pads is crucial in eliminating poor gold wire adhesion. It is also observed that the thickness of copper oxides at the surface of the bond pad may not attribute to the non-stick failures but the relative concentration of copper oxide at the respective surface depth may influence the contact quality between gold wire and the pad. Relative to well bonded pads, the sputtering rate for copper on the non-stick pads´ surface were lower. Copper impurities from plating process potentially adhere onto the surface of the bond pads and subsequently inhibit the attempt of wire bonding.
Keywords :
X-ray photoelectron spectra; contamination; copper; electrical contacts; failure analysis; lead bonding; nickel compounds; sputtering; Cu; NiPd; X-ray photoelectron spectroscopy analysis; contact quality; copper bond pad; copper contamination; copper impurities; gold wire; gold wire adhesion; nickel-palladium bond pad; plating process; sputter depth profiles; wire bonding failures; Bonding; Chemicals; Copper; Electrons; Gold; Impurities; Spectroscopy; Sputtering; Surface contamination; Wire;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits (IPFA), 2010 17th IEEE International Symposium on the
Conference_Location :
Singapore
Print_ISBN :
978-1-4244-5596-6
DOI :
10.1109/IPFA.2010.5531985