DocumentCode
3295882
Title
Improving failure analysis navigation Using optical super resolved imaging
Author
Gur, Eran ; Weizman, Yoav ; Zalevsky, Zeev
Author_Institution
Shenkar Coll., Ramat Gan, Israel
fYear
2009
fDate
6-10 July 2009
Firstpage
19
Lastpage
23
Abstract
The authors present a new numerical approach for improving the resolving power of low resolution images which is applied for failure analysis of microelectronic chips. The resolution improvement is based upon a numerical iterative comparison between a high resolution layout image and a low resolution experimentally captured image of the same region of interest.
Keywords
failure analysis; image resolution; iterative methods; microprocessor chips; optical images; failure analysis navigation; image resolution; microelectronic chip; numerical approach; optical super resolved imaging; Failure analysis; Geometrical optics; Image resolution; Lenses; Navigation; Optical devices; Optical imaging; Silicon; Solids; Spatial resolution;
fLanguage
English
Publisher
ieee
Conference_Titel
Physical and Failure Analysis of Integrated Circuits, 2009. IPFA 2009. 16th IEEE International Symposium on the
Conference_Location
Suzhou, Jiangsu
ISSN
1946-1542
Print_ISBN
978-1-4244-3911-9
Electronic_ISBN
1946-1542
Type
conf
DOI
10.1109/IPFA.2009.5232708
Filename
5232708
Link To Document