A piezo-on-slider type linear ultrasonic motor for the application of positioning stages

In this paper, a piezo-on-slider type linear ultrasonic motor (USM) for the application of positioning stages is described. The positioning stage driven by the piezo-on-slider type linear USM has a very simple and compact structure, which consists of a commercially available linear guide and the linear USM. The piezo-on-slider type linear ultrasonic motor is just a 60 mm×10 mm×3.5 mm rectangular plate. Quick response, no backlash, high resolution, off power self-braking and large working range are the attractive characteristics of this new type of linear positioning stages. The testing results of the stage are: moving range 220 mm (variable depending on the linear guide), no-load speed 80 mm/s, ratings 23 mms ^-1/300 gf, holding force 700 gf, starting thrust 500 gf, resolution <50 nm, response time of 12 ms from stationary status to constant velocity (80 mm/s) with a initial mass of 260 g