Title :
Anomalous “sweeping stress” induced degradation in n-type low temperature poly-Si thin film transistors
Author :
Dapeng Zhou ; Mingxiang Wang ; Meng Zhang ; Han Hao ; Han, Hao ; Man Wong
Author_Institution :
Dept. of Microelectron., Soochow Univ., Suzhou, China
Abstract :
Anomalous "sweeping stress" induced degradation is first observed in n-type metal-induced laterally crystallized low temperature thin film transistors (TFTs). Key stress parameters include the maximum drain bias, the sweeping time and the number of sweeping. Degradation occurs only when the maximum drain bias exceeds a critical value. Both transfer and output characteristic degradation is found much similar to that of hot carrier (HC) degradation. But longer sweeping time causes larger degradation, which is opposite to that in dynamic HC degradation. Besides, such degradation can only be observed in low temperature crystallized TFTs.
Keywords :
elemental semiconductors; hot carriers; silicon; thin film transistors; anomalous sweeping stress induced degradation; crystallized low temperature thin film transistors; hot carrier degradation; maximum drain bias; n-type low temperature poly-Si thin film transistors; sweeping time; Annealing; Crystallization; Degradation; Hot carriers; Microelectronics; Pulse measurements; Stress; Temperature; Thin film transistors; Threshold voltage;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits, 2009. IPFA 2009. 16th IEEE International Symposium on the
Conference_Location :
Suzhou, Jiangsu
Print_ISBN :
978-1-4244-3911-9
Electronic_ISBN :
1946-1542
DOI :
10.1109/IPFA.2009.5232717