Title :
Radiation effects on mechanical characteristics of MEMS
Author :
Wang, L. ; Huang, Q.A. ; Tang, J. ; Luo, J.
Author_Institution :
Key Lab. of MEMS of Minist. of Educ., Southeast Univ., Nanjing, China
Abstract :
This paper reports radiation effects on mechanical characteristics of MEMS fixed-fixed beams and cantilevers after Co60 radiation. Radiation test is performed and resonant frequencies are measured by LDV. And stress relaxation has been recognized as main reason by theoretical analysis.
Keywords :
beams (structures); cantilevers; micromechanical devices; radiation effects; stress relaxation; MEMS; cantilever; fixed-fixed beam; mechanical characteristics; radiation effect; radiation test; resonant frequency; stress relaxation; Electrostatics; Laboratories; Microelectromechanical devices; Micromechanical devices; Performance evaluation; Radiation effects; Resonant frequency; Structural beams; Temperature; Testing;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits, 2009. IPFA 2009. 16th IEEE International Symposium on the
Conference_Location :
Suzhou, Jiangsu
Print_ISBN :
978-1-4244-3911-9
Electronic_ISBN :
1946-1542
DOI :
10.1109/IPFA.2009.5232728
