Title :
Precision long-focus field-emission low-energy multibeam klystrode-type electron gun
Author :
Chubun, N.N. ; Galdetsky, A.V. ; Golenitsky, I.I. ; Sokolova, I.M.
Author_Institution :
ISTOK R&P Corp., Moscow, Russia
Abstract :
High precision long-focus field-emission low-energy electron probe was designed on base of the thin-film cold cathode. Some parts of electrostatic focusing system and 10 GHz pulse modulator are integrated with the cathode. The electron probe operates at liquid helium temperature. The smallest size of the electron spot after passage through 200 mm long drift space does not exceeded 3 μ
Keywords :
cold-cathode tubes; electron guns; focusing; pulse modulation; vacuum microelectronics; 10 GHz; 200 mm; electron probe; electron spot; electrostatic focusing system; field-emission low-energy multibeam device; klystrode-type electron gun; liquid helium temperature; long-focus device; pulse modulator; thin-film cold cathode; Apertures; Cathodes; Electrodes; Electron beams; Electron optics; Electrostatics; Lenses; Probes; Pulse modulation; Temperature;
Conference_Titel :
Vacuum Microelectronics Conference, 1996. IVMC'96., 9th International
Conference_Location :
St. Petersburg
Print_ISBN :
0-7803-3594-5
DOI :
10.1109/IVMC.1996.601889
