Title :
Research on the processing of vacuum microelectronic flat-panel displays
Author :
Lu-jiang, Huangfu ; Chun, Zhu Chang ; Yong-Jing, Huai ; Zhi-Ling, Tie ; Yuming, Li ; Cailing, Guo
Author_Institution :
Dept. of Electron. Eng., Xi´´an Jiaotong Univ., China
Abstract :
The processing developed recently for vacuum microelectronic flat-panel nixies is described, including mainly how to fabricate the anode pillars (array) and the transparent flat-panel vacuum packages. Flat-panel nixies have been fabricated by the processing. The I-V characteristic between gates and cathodes was ideal. Field emission characteristic, accompanied by fluorescent light was also detected between cathodes and anodes. There are still some problems in maintaining the vacuum in package. The reasons are analyzed in the last part of the paper
Keywords :
anodes; electron field emission; flat panel displays; large screen displays; vacuum microelectronics; I-V characteristic; anode pillars; field emission characteristic; flat-panel displays; fluorescent light; transparent flat-panel vacuum packages; vacuum microelectronics; Anodes; Displays; Dry etching; Electron tubes; Glass; Industrial electronics; Microelectronics; Packaging; Powders; Seals;
Conference_Titel :
Vacuum Microelectronics Conference, 1996. IVMC'96., 9th International
Conference_Location :
St. Petersburg
Print_ISBN :
0-7803-3594-5
DOI :
10.1109/IVMC.1996.601890
